Applications
- Flatness measurement of polished surfaces
- Roughness measurements
- Measuring curvatures of polished surfaces
Advantages
- High resolution measurements
- Extended measurement by zone linkage
- Intuitive analysis and control software
- Unique high-performance surface alignment
Product's features
Specifications
Field of view | 16 mm x 12 mm for one view |
Sampling | 0.8 to 4 MP |
Vertical resolution | <1 nm RMS |