OptoSURF

The OptoSURF is a modular, high-resolution, full-field optical profilometer for the measurement of microstructures and surface conditions.

This measuring station can be adapted to the application and sample size with varying degrees of automation.

It allows to characterize both super polished surfaces (semiconductor and optical) and structured surfaces (metal, plastic, nails, hair…).

Optosurf software supports the acquisition and analysis of 3D surface data: roughness, porosity, density of structural patterns, detection and classification of defects, etc.

A tool to help follow manufacturing processes, it meets the requirements of fine metrology of surface conditions.

Applications

Surface finish: super polished optical, semi- conducting
Micro structures: metals, polymers, plastics, textile, paper
Ex-Vivo : hair, nails

Advantages

Sub-nanometric resolution
Multiple measurement mode
Adaptable to any sample size

Product's features

Magnification	5X	10X	20X	50X
Measurement surface (mm²) 5Mp/1.6Mp	1.68 x 1.0 / 1.0 x 0.74	0.84 x 0.69 / 0.5 x 0.37	0.42 x 0.34 / 0.25 x 0.14	0.17 x 0.14 / 0.1 x 0.07
Depth of focus (µm)	27	3.06	1.71	0.9
Working distance (mm)	9	7.4	4.7	3.4
Optical resolution (µm)	2.1	0.9	0.69	0.5
Lateral sampling (µm)	0.7	0.34	0.17	0.06
Repeatability Phase mode (nm)	1	0.5	0.5	0.5
Repeatability Wave mode (nm)	2	1	1	1

Documents

OptoSURF Documentation

Surface characterization

OptoSURF

Applications

Advantages

Product's features

Documents

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