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3D measurement of surfaces


Full-field interferometric optical profilometer based on a reflectance microscope. This profilometer offers several measurement modes, from phase shift interferometry, fringe scanning, or confocal depending on the surface conditions or structures to be measured. Software supports the acquisition and analysis of 3D surface data (visualization, roughness, defects, etc.)

This system is available in several versions for small or large samples, or even very large samples with degrees of automation more or less complete.

The Z measurement range goes from tenth of a nanometer to hundreds of microns depending on the measurement mode used.