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Surface measurement by interferometry

Techniques

Phase mode

Base on phase shifting interferometry, the fringes are shifted in Z, (commonly using a PZT), to produce several images to be able to calculate the phase difference for each point. The resolution of this mode is a fraction of the wavelenght used ( about 1 nm)

Wave mode

The wave mode is quite similar to the phase mode but it shift over a wider range of Z and calculate an order for each Z steps. This mode remove ambiguities related to finge disruption over the image. The resolution is identical to the phase mode

Confocal mode

This mode is based on the fringe cosntrats over the Z range of scaning. This mode is adapted to complex structure and its resolution is given by the Z steps ( 10 to 50 nm)